产品目录

产品信息 »  产品目录  » 无润滑脂 氮气(N2)对应元件  » 工艺气体元件

工艺气体元件

膜片阀 高纯度工艺气体用 AP

    ・用于半导体等需要高洁净度气体的行业。
    ・可作为气体的切断阀使用。
    ・接触气体部分无弹簧,驱动部也使用膜片隔离,因此减小了气路的死区,抑制了粒子的产生。
系列形式主体材质配管连接配管尺寸
AP气控型SUS316L
二次熔炼
面密封接头
管焊接
1/4'',3/8''
1/2'',3/4''
AP小型SUS316L
二次熔炼
面密封接头
管焊接
1/4'',3/8''
1/2'',3/4''

产品特点

■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
  • For UHP gas delivery in semiconductor and other clean industries.
  • Body material: 316L SS secondary remelt or 316L SS
  • Electropolished wetted parts
  • Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
  • For wide variety of applications from semiconductor to general.
  • Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
  • For UHP gas delivery in semiconductor and other clean industries.
  • Used as gas shutoff valve.
  • No spring is used for the wetted parts and drive part is also separated
    from the diaphragm. Dead space in the flow path is small to suppress
    the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP

[Check valve]

  • Fluid back-flow is prevented by back pressure.
  • Unique design with only one moving part in the gas stream, an O-ring.
  • Springless structure suppresses particle generation by vibration or
    chattering or pressure fluctuation on downstream side.

[Vacuum generator]

  • Vacuum generation equipment.
  • Applicable to emission of unnecessary gas remaining inside the
    piping during gas cylinder replacement.

[Flow switch]

  • Detects excess flow above a given flow rate, caused by pipe breakage, etc.

Go Top