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工艺气体元件

减压阀(压力调节器) 高纯度工艺气体用 AP/SL/AP/AZ

    ・适合半导体等需要供给高洁净度气体的行业。
    ・主体材质为SUS316L二次熔炼或SUS316L。
    ・接触气体部分经过电解研磨处理。
    ・外部金属密封构造。
  • 减压阀(压力调节器) 高纯度工艺气体用 AP/SL/AP/AZ
    说明书
    系列 形式 查看搜索结果
    AP/SL一段式
    AP/SL一段式
    AP/SL一段式
    AP/SL一段式
    AP/SL一段式
    AP二段式
    AZ一段式查看搜索结果
    AZ一段式查看搜索结果
    AZ一段式查看搜索结果
系列形式用途主体材质配管连接配管尺寸
AP/SL一段式管路用(小型)SUS316L
二次熔炼
面密封接头
管焊接
1/4'',3/8''
AP/SL一段式管路用SUS316L
二次熔炼
面密封接头
管焊接
1/4'',3/8''
1/2'',3/4''
AP/SL一段式大宗气体用SUS316L面密封接头
管焊接
1/2'',3/4'',1''
AP/SL一段式一次侧高压用SUS316L
二次熔炼
面密封接头
管焊接
1/4'',3/8''
1/2'',3/4''
AP/SL一段式负压调节SUS316L
二次熔炼
面密封接头
管焊接
1/4'',3/8''
1/2'',3/4''
AP二段式一次侧高压用SUS316L
二次熔炼
面密封接头
管焊接
1/4'',3/8''
AZ一段式管路用SUS316L面密封接头
管焊接
1/4'',3/8''
1/2''
AZ一段式一次侧高压用SUS316L面密封接头
管焊接
1/4'',3/8''
1/2''
AZ一段式负压调节SUS316L面密封接头
管焊接
1/4'',3/8''
1/2''

产品特点

■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
  • For UHP gas delivery in semiconductor and other clean industries.
  • Body material: 316L SS secondary remelt or 316L SS
  • Electropolished wetted parts
  • Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
  • For wide variety of applications from semiconductor to general.
  • Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
  • For UHP gas delivery in semiconductor and other clean industries.
  • Used as gas shutoff valve.
  • No spring is used for the wetted parts and drive part is also separated
    from the diaphragm. Dead space in the flow path is small to suppress
    the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP

[Check valve]

  • Fluid back-flow is prevented by back pressure.
  • Unique design with only one moving part in the gas stream, an O-ring.
  • Springless structure suppresses particle generation by vibration or
    chattering or pressure fluctuation on downstream side.

[Vacuum generator]

  • Vacuum generation equipment.
  • Applicable to emission of unnecessary gas remaining inside the
    piping during gas cylinder replacement.

[Flow switch]

  • Detects excess flow above a given flow rate, caused by pipe breakage, etc.

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