WEB Catalog

Product Information »  WEB Catalog  » Equipment for the Semiconductor Industries  » Cooling Water Line

Cooling Water Line


A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

Direct Operated/Pilot Operated 2-Port Solenoid Valve JSX/JSX□

Features
    · Zero Differential Pressure Type Pilot Operated 2-Port Solenoid Valve
    　JSXZ Series has been added. New
    · Improved environmental resistance due to the stainless steel coil cover
    　[IP67 enclosure/NEMA4X∗] ∗ IP65 for models with a DIN terminal
    ·Space saving
    　Compact: Valve volume reduced by 25%*, Lightweight: Weight reduced
    　by 30%*
    　* Compared with the existing model
    ·Energy saving
    　Coil force: 10% increase*, Power consumption: 14% reduction*
    　* Compared with the existing model
    ·360° lead wire insertion and removal is possible.
    ·Improved weather resistance in outdoor environments
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics
Series Variations/Selection Procedure/Solenoid Valves List/Air Operated Valves List
Green Procurement (RoHS)
SeriesTypeValve typePort sizeOrifice diameter (mmø)
JSXDirect operatedN.C/N.O.1/8, 1/4, 3/81.6 to 7.1
JSX□□UDirect operated high flow/ power saving typeN.C.1/8, 1/4, 3/82.4 to 7.1
JSX□□VDirect operated vacuum typeN.C.1/8, 1/4, 3/85.6 to 7.1
JSX□□HDirect operated high pressure typeN.C.1/4, 3/83.2
JSX□□SDirect operated steam typeN.C.1/4, 3/81.6，7.1
JSXMDirect operated modular mounting typeN.C.1/8，1/4，3/8，1/23.2，4
JSXDPilot operatedN.C./N.O.1/4，3/8，1/2，3/4，1，1·1/4，1·1/2，2，32A，40A，50A10 to 50
JSXPSteam typeN.C.3/8，1/2，3/4，1，1·1/4，1·1/2，2，32A，40A，50A15 to 50
JSXZZero differential pressure type pilot operatedN.C.1/4，3/8，1/2，3/4，110 to 25

Compact Direct Operated 2 Port Solenoid Valve (2 Way Valve) VDW

Features
    ・For air, medium vacuum, water
    ・Body material: Aluminum, Resin (PPS), Brass, Stainless steel
    ・With One-touch fittings (resin body)
    ・IP65
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Compact Direct Operated 2 Port Solenoid Valve (2 Way Valve) VDW
    DoC/IM
    Series View search result
    VDW10/20View search result
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics　Series Variations/Solenoid Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter
VDW10/20N.C.φ3.2, φ4, φ6, M5, 1/8φ1 to φ3.2

Compact Direct Operated 3 Port Solenoid Valve (3 Way Valve) for Water and Air VDW200/300

    ∗ The production of the VDW10/20 series was discontinued
    　in December 2012. Please select the new VDW10/20 series.
    ∗ Excludes the VDW10/20 series manifold
    ∗ The production of the VDW30 series was discontinued
    　in July 2015. Please select the VX21 series.
    ∗ The production of the 3-port solenoid valve VDW200/300 series
    　is continued.
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Technical Data　Series Variations/Solenoid Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VDW10/20/30N.C.M5 to 1/4 (8A)1 to 4
VDW200/300C.O.M5 to 1/4 (8A)1 to 4

Clean Regulator SRH

    ・Contamination-controlled stainless steel regulator
    ・Oil-free
    ・2 types of diaphragm materials: PTFE, Fluororubber
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment
Product Selection Guide　Green Procurement (RoHS)
SeriesRelief mechanismPort sizeSet pressure (MPa)
SRHNon-reliefRc1/8，1/4，3/8，1/2
9/16-18UNF，7/8-14UNF		Low pressure type：0.02 to 0.2
High pressure type：0.05 to 0.7
SRHReliefRc1/8，1/4，3/8，1/2Low pressure type：0.02 to 0.2
High pressure type：0.05 to 0.7

3-Screen Display High-Precision Digital Pressure Switch 
ZSE20□(F)/ISE20□

Features
    ・A low differential pressure range type has been added to the 20A
    　series. [New]
    ・Integrated R1/8 fitting with bottom wiring entry
    ・An M12 connector type has been added.
    ・A low pressure range type has been added.
    ・Visualization of settings
    ・Simple 3-step setting
    ・Easy screen switching
    　It is possible to change the settings while checking the measured value.
    ・Delay time:1.5 ms or less
    ・Current consumption: 25 mA or less
    ・IO-Link compatible
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 3-Screen Display High-Precision Digital Pressure Switch 
    ZSE20□(F)/ISE20□
    Manual
    Series Type View search result
    ZSE20 (F) ISE20Compound pressure, Vacuum pressure, Positive pressureView search result
    ZSE20A (F) ISE20ACompound pressure, Vacuum pressure, Positive pressureView search result
    ZSE20AF-X576 to 580 (Made to Order)Compound pressureView search result
    ZSE20AF-X576 to 580 (Made to Order)Compound pressureView search result
    ZSE20B (F)-(L) ISE20B-(L)Compound pressure, Vacuum pressure, Positive pressureView search result
    ZSE20C (F)-(L) ISE20C (H)-(L)Compound pressure, Vacuum pressure, Positive pressureView search result
  • 3-Screen Display High-Precision Digital Pressure Switch 
    ZSE20□(F)/ISE20□
    DoC/IM
    Series Type View search result
    ZSE20 (F) ISE20Compound pressure, Vacuum pressure, Positive pressureView search result
    ZSE20A (F) ISE20ACompound pressure, Vacuum pressure, Positive pressureView search result
    ZSE20AF-X576 to 580 (Made to Order)Compound pressureView search result
    ZSE20AF-X576 to 580 (Made to Order)Compound pressureView search result
    ZSE20B (F)-(L) ISE20B-(L)Compound pressure, Vacuum pressure, Positive pressureView search result
    ZSE20C (F)-(L) ISE20C (H)-(L)Compound pressure, Vacuum pressure, Positive pressureView search result
Safety Instructions　Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example　Glossary of Terms/Technical Information
Green Procurement (RoHS)
SeriesOutput typeTypeRated pressure rangeEnclosureApplicable fluid
ZSE20 (F) ISE201 outputCompound pressure, Vacuum pressure, Positive pressure−100.0 to 100.0 kPa, 0.0 to −101.0 kPa, −0.100 to 1.000 MPaIP40Air
ZSE20A (F) ISE20A2 outputs, Analog output (Voltage/Current)Compound pressure, Vacuum pressure, Positive pressure−100.0 to 100.0 kPa, 0.0 to −101.0 kPa, −0.100 to 1.000 MPaIP40Air
ZSE20AF-X576 to 580 (Made to Order)2 outputs, Analog output (Voltage/Current)Compound pressure−50.0 to 50.0Pa, −100.0 to 100.0Pa, −200 to 200.0PaIP40Air
ZSE20AF-X576 to 580 (Made to Order)2 outputs, Analog output (Voltage/Current)Compound pressure−500 to 500Pa, −1.000 to 1.000kPa, −2.00 to 2.00kPa, −5.00 to 5.00kPa, −10.00 to 10.00kPaIP40Air
ZSE20B (F)-(L) ISE20B-(L)2 outputs, Analog output (Voltage/Current), IO-Link/Switch: 1 outputCompound pressure, Vacuum pressure, Positive pressure−100.0 to 100.0 kPa, 0.0 to −101.0 kPa, −0.100 to 1.000 MPaIP65Air
ZSE20C (F)-(L) ISE20C (H)-(L)2 outputs, Analog output (Voltage/Current), IO-Link/Switch: 1 outputCompound pressure, Vacuum pressure, Positive pressure−100.0 to 100.0 kPa, 0.0 to −101.0 kPa, −0.100 to 1.000 MPa, −0.100 to 2.000 MPaIP65General fluids

Compact Digital Pressure Switch ZSE10(F)/ISE10

    ・Low profile 9.8 mm
    ・Vertical mounting space reduced to approx. 1/2
    　(Compared to ZSE/ISE30A series)
    ・Simultaneous copying is possible for maximum 10 units.
    ・3-step setting
Safety Instructions　Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example　Glossary of Terms/Technical Information
Green Procurement (RoHS)
SeriesTypeRated pressure range
ZSE10FCompound pressure－100.0 to 100 kPa
ZSE10Vacuum pressure0.0 to －101.0 kPa
ISE10Positive pressure－0.100 to 1.000 MPa

3-Screen Display High-Precision Digital Pressure Switch 
ISE7□/7□G/79S

Features
    ・It is possible to change the settings while checking the measured value.
    ・IO-Link
    ・Angled display
    　Good visibility from various mounting positions
    ・Rotating display
    　Display can rotate 336 degrees after installation
    ・Applicable fluid：Air, Non-corrosive gas, Non-flammable gas (ISE70/71)
    　　　　　　　　 ：Liquid or gas that will not corrode materials of parts
    　　　　　　　　　 in contact with fluid (ISE7□G/79S)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 3-Screen Display High-Precision Digital Pressure Switch 
    ISE7□/7□G/79S
    Manual
    Series Type View search result
    ISE70Positive pressure (For air)View search result
    ISE71Positive pressure (For air)View search result
    ISE70GPositive pressure (For general fluids)View search result
    ISE75GPositive pressure (For general fluids)View search result
    ISE76GPositive pressure (For general fluids)View search result
    ISE77GPositive pressure (For general fluids)View search result
    ISE78GPositive pressure (For general fluids)View search result
    ISE79SPositive pressure (For general fluids)View search result
  • 3-Screen Display High-Precision Digital Pressure Switch 
    ISE7□/7□G/79S
    DoC/IM
    Series Type View search result
    ISE70Positive pressure (For air)View search result
    ISE71Positive pressure (For air)View search result
    ISE70GPositive pressure (For general fluids)
    ISE75GPositive pressure (For general fluids)
    ISE76GPositive pressure (For general fluids)
    ISE77GPositive pressure (For general fluids)
    ISE78GPositive pressure (For general fluids)
    ISE79SPositive pressure (For general fluids)
Safety Instructions　Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example　Glossary of Terms/Technical Information
Green Procurement (RoHS)
SeriesTypeRated pressure range
ISE70Positive pressure (For air)0 to 1MPa
ISE71Positive pressure (For air)0 to 1.6MPa
ISE70GPositive pressure (For general fluids)0 to 1MPa
ISE75GPositive pressure (For general fluids)0 to 2MPa
ISE76GPositive pressure (For general fluids)0 to 5MPa
ISE77GPositive pressure (For general fluids)0 to 10MPa
ISE78GPositive pressure (For general fluids)0 to 16MPa
ISE79SPositive pressure (For general fluids)0 to 50MPa

Pressure Sensor for General Fluids PSE56□

    ・Wetted parts: Stainless steel 316L
    ・IP65
    ・Suitable for a wide variety of fluids
    ・Analog output (Voltage/Current)
    ・Low leakage
    　Select from a face seal or compression fitting.
Safety Instructions　Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example 　Glossary of Terms/Technical Information
Green Procurement (RoHS)
SeriesTypeRated pressure range
PSE561Vacuum pressure0 to －101 kPa
PSE563Compound pressure－100 to 100 kPa
PSE564Positive pressure0 to 500 kPa
PSE560Positive pressure0 to 1 MPa

Pressure Sensor/Switch for General Fluids PSE57□

Features
    ・PSE Sensor Set Up Tool PSE-ST has been added. [New]
    ・Switch output specification
    ・IO-Link compatible
    ・Withstand voltage: 500 VAC
    ・Enclosure: IP65
    ・Materials of parts in contact with fluid
    　Piping port: C3604 + Nickel plating
    　Pressure sensor: Al2O3 (Alumina 96%)
    　O-ring: FKM + Grease (PSE570/573/574)
    　Square ring: FKM (PSE575/576/577)
Safety Instructions　Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example 　Glossary of Terms/Technical Information
Green Procurement (RoHS)
SeriesTypeRated pressure rangeProof pressure
PSE570Positive pressure0 to 1 MPa3.0 MPa
PSE573Compound pressure－100 to 100 kPa600 kPa
PSE574Positive pressure0 to 500 kPa1.5 MPa
PSE575Positive pressure0 to 2 MPa5.0 MPa
PSE576Positive pressure0 to 5 MPa12.5 MPa
PSE577Positive pressure0 to 10 MPa30 MPa

3-Color Display Digital Flow Switch for Water PF3W-Z/L

Features
    ・Applicable fluid: Water, Ethylene glycol aqueous solution
    ・Lightweight: Max. 53% reduction (40 L/min, With temperature sensor)
    ・IO-Link compatible
    ・3-color/2-screen display
    ・Compatible with the temperature sensor & flow adjustment valve
    ・Fluid temperature: 0 to 90℃
    ・Compatible with the PFG200 series 3-screen display 4-channel flow
    　monitor

    　▶IO-Link Master
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 3-Color Display Digital Flow Switch for Water PF3W-Z/L
    Manual
    Series View search result
    PF3W-ZView search result
    PF3W-L
    (IO-Link compatible)    		View search result
  • 3-Color Display Digital Flow Switch for Water PF3W-Z/L
    DoC/IM
    Series View search result
    PF3W-ZView search result
    PF3W-L
    (IO-Link compatible)    		View search result
Safety Instructions　Pressure Switches/Flow Switches/Precautions　Flow Switch Series Variations
Green Procurement (RoHS)　IO-Link Master
SeriesRated flow range (L/min)
PF3W-Z0.5 to 4
2 to 16
5 to 40
10 to 100
PF3W-L
(IO-Link compatible)		0.5 to 4
2 to 16
5 to 40
10 to 100
50 to 250

Digital Flow Switch Manifold for Water PF3WB/C/S/R

Features
    ・Applicable fluid: Water, Ethylene glycol aqueous solution
    ・Space saving
    　Footprint Max. 85% reduction
    　Weight Max. 65% reduction
    ・Needs no piping: Work-hour for installation reduced by up to 45%
    ・IO-Link compatible
    ・3-color/2-screen display
    ・Fluid temperature: 0 to 90℃

    　▶IO-Link Master
Safety Instructions　Pressure Switches/Flow Switches/Precautions　Flow Switch Series Variations
Green Procurement (RoHS)　IO-Link Master
SeriesRated flow range (L/min)
PF3WB
Integrated type (Basic type)		0.5 to 4
2 to 16
5 to 40
PF3WC
Integrated type (Straight type)		0.5 to 4
2 to 16
5 to 40
PF3WS
Remote type (Supply type)		0.5 to 4
2 to 16
5 to 40
PF3WR
Remote type (Return type)		0.5 to 4
2 to 16
5 to 40

Filter for Cleaning Fluid/Quick Change Filter FQ1

    ・Ideal for low-flow filtration (Max. 30 L/min)
    ・No tools are required.
    ・Takes only 60 seconds for element replacement
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Industrial Filters/Precautions　Selection　Green Procurement (RoHS)
SeriesPort sizeMax. operating pressureOperating temperature (℃)
FQ1Rc1/2, 3/4, 11 MPaMAX. 80

Go Top