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Clean Gas Filters/Air Filters

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Clean Gas Filter SF

    ・Cartridge type allows for element replacement
      (SFA100/200/300, SFB100)
    ・Compact, disposable type for the semiconductor industry
     (SFB300, SFC100)
TypeSeriesOperating pressureFiltration (μm)
Cartridge type discSFA100/200/300Max. 0.99 MPa
(Vacuum: 1.3×10-6 kPa)
0.01
(Filtration efficiency: 99.99%)
Cartridge type straightSFB100Max. 0.99 MPa
(Vacuum: 1.3×10-6 kPa)
0.01
(Filtration efficiency: 99.99%)
Cartridge type straightSFB200Max. 0.99 MPa
(Vacuum: 1.3×10-6 kPa)
120
Disposable type straightSFB300Max. 0.99 MPa
(Vacuum: 1.3×10-6 kPa)
0.01
(Filtration efficiency: 99.99%)
Disposable type multiple discSFC100Max. 0.99 MPa
(Vacuum: 1.3×10-6 kPa)
0.01
(Filtration efficiency: 99.99%)

Clean Air Filter/Hollow Fiber Element SFD

    ・Built-in hollow fiber element
    ・Pressure drop: 0.03 MPa (Inlet pressure 0.7 MPa, Max. flow rate)
    ・Compliant with the RoHS Directives regulations regarding the reduction of environmentally detrimental chemicals
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  • Clean Air Filter/Hollow Fiber Element SFD
    Manual
    Series Type View search result
    SFD100Disposable type
    (Irreplaceable element)
    View search result
    SFD200Cartridge type
    (Replaceable element)
    View search result
SeriesTypeOperating pressureFiltration (μm)
SFD100Disposable type
(Irreplaceable element)
Max.1.0MPa0.01
(Filtration efficiency: 99.99%)
SFD200Cartridge type
(Replaceable element)
Max.1.0MPa0.01
(Filtration efficiency: 99.99%)

Clean Air Module LLB

    ・Modularized clean equipment (Reduced piping labor/Space saving)
     Makes clean air easily available
    ・Nominal filtration rating: 0.01 μm (Filtration efficiency: 99.99%)
    ・Wetted parts: Grease-free, Silicone-free
    ・Assembled in a clean room, Shipped and packed in double packaging
    ・24 combinations are available.

     Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1
SeriesFluidSet pressureFlow range L/min (ANR)
LLB3Clean air
N2 gas Note)
0.05 to 0.4 MPa5 to 100
LLB4Clean air
N2 gas Note)
0.05 to 0.4 MPa50 to 500

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