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High Vacuum Valves

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Aluminum High Vacuum Angle Valve XLA/C/F/G

    ・Aluminum bodied
     Uniform baking temperature
     Lightweight, Compact
     Minimal outgassing
     Minimal contamination from heavy metals
    ・Bellows are replaceable.
SeriesActuationValve
type
Shaft seal
type
ApplicationFlange
size
XLA-2Air
operated
Single
acting
(N.C.)
Bellows sealDust free,
Cleaned
16 to 80
XLAV-2
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows sealDust free,
Cleaned
16 to 80
XLC-2Air
operated
Double
acting
Bellows sealDust free,
Cleaned
16 to 80
XLF-2Air
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation,
High operating cycles
16 to 80
XLFV-2
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation,
High operating cycles
16 to 80
XLG -2Air
operated
Double
acting
O-ring sealHigh-speed operation,
High operating cycles
16 to 80

Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152

    ・Improved durability of bellows (Flange sizes 100 and 160)
    ・Service life of two million cycles
    ・Space required for equipment can be reduced
     Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
     Increased flexibility of mounting orientation
    ・Lightweight, Compact
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesActuationValve
type
Shaft seal
type
ApplicationFlange
size
XLA-100/160-X152Air
operated
Single
acting
(N.C.)
Bellows sealDust free,
Cleaned
100,160
XLC-100/160-1-X152Air
operated
Double
acting
Bellows sealDust free,
Cleaned
100,160

Aluminum High Vacuum Angle Valve XL□

    ・High fluorine resistance
    ・Minimal outgassing
    ・Minimal contamination from heavy metals

    ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
     discontinued in September 2017.
     Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
SeriesActuationValve
type
Shaft seal
type
ApplicationFlange
size
XLAAir
operated
Single
acting
(N.C.)
Bellows sealDust-free
Cleaned
16 to 160
XLAV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows sealDust-free
Cleaned
16 to 160
XLCAir
operated
Double
acting
Bellows sealDust-free
Cleaned
16 to 160
XLCV
(With solenoid valve)
Air
operated
Double
acting
Bellows sealDust-free
Cleaned
16 to 80
XLFAir
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation
High operating cycles
16 to 160
XLFV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation
High operating cycles
16 to 160
XLGAir
operated
Double
acting
O-ring sealHigh-speed operation
High operating cycles
16 to 160
XLGV
(With solenoid valve)
Air
operated
Double
acting
O-ring sealHigh-speed operation
High operating cycles
16 to 80
XLDAir
operated
Single
acting
(N.C.)
Bellows/O-ring
seal
For preventing dust turbulence
For preventing a pump from
running overloaded
25 to 160
XLDV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows/O-ring
seal
For preventing dust turbulence
For preventing a pump from
running overloaded
25 to 160
XLHManualManualBellows sealDust-free
Cleaned
16 to 50
XLSElectromagneticSingle
acting
(N.C.)
(Bellows balance)For portable equipment not
requiring air
16, 25

Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ

    ・One-touch connection and release (No tools are required.)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesActuationShaft seal
type
Valve
type
MaterialFlange
size
XLAQAir
operated
Bellows sealSingle acting
(N.C.)
Body : Aluminum
Bellows : Stainless steel 316L
16 to 50
XLDQAir
operated
Bellows seal
O-ring seal
Single acting
(N.C.)
Body : Aluminum
Bellows : Stainless steel 316L
40, 50

Stainless Steel High Vacuum Angle/In-line Valve XM/XY

    ・The precision casting, unified composition prevents the accumulation of gas.
    ・The XM series is interchangeable with the XL series aluminum high vacuum angle valve.

    Note) Size 16 is not available for the in-line type.
SeriesActuationShaft seal
type
Valve
type
MaterialFlange
size
XMA/XYAAir operatedBellows sealSingle acting
(N.C.)
Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L
16 to 80 Note)
XMC/XYCAir operatedBellows sealDouble actingBody : SCS13 (Eequivalent to
stainless steel 304)
Bellows : Stainless steel 316L
16 to 80 Note)
XMD/XYDAir operatedBellows/O-ring
seal
Single acting
(N.C.)
Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L
25 to 80
XMH/XYHManualBellows sealManualBody : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L
16 to 50 Note)

Normal Close High Vacuum Solenoid Valve XSA

    ・Minimum operating pressure: 1 × 10-6 Pa (abs)
    ・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
    ・2 types of fittings and female threads are available.
    ・Power consumption: Max. 25% reduction
    ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
SeriesValve typeFluidPipingPort size
XSANormally closedAir
Inert gas
Face seal fitting
Compression fitting
1/4, 3/8
XSANormally closedAir
Inert gas
Rc, NPT female thread1/8, 1/4, 3/8

Smooth Vent Valve XVD

    ・The valve/needle valve-integrated construction requires only 1/4 the piping space of previous models.
    ・Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
    ・Flow of both the initial air supply and the main air supply can be adjusted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesValve typeFluidPipingPort size
XVDNormally closed
(Pressurize to open, Spring seal)
Nitrogen, Air,
Inert gas, etc.
VCR®
Swagelok®
1/4B

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