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Process Gas Equipment

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Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

    ・For UHP gas delivery in semiconductor and other clean industries
    ・Body material: 316L SS secondary remelt or 316L SS
    ・Electropolished wetted parts
    ・External metal seal construction
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesTypeApplicationBody materialConnection typeConnection size
AP/SLSingle stageDistribution (Compact)316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
AP/SLSingle stageDistribution316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageBulk gas316L SSFace seal
Tube weld
1/2'', 3/4'', 1''
AP/SLSingle stageSource316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageSub-atmospheric pressure316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
APTwo stageSource316L SS
secondary remelt
Face seal
Tube weld
1/4'',3/8''
AZSingle stageDistribution316L SSFace seal
Tube weld
1/4'', 3/8''
1/2''
AZSingle stageSource316L SSFace seal
Tube weld
1/4'', 3/8''
1/2''
AZSingle stageSub-atmospheric pressure316L SSFace seal
Tube weld
1/4'', 3/8''
1/2''

Regulator/Back Pressure Regulator for General Applications AK/BP

    ・For a wide variety of applications from semiconductor to general
    ・Body material of 316 SS or brass is available depending on the gas.
SeriesTypeApplicationBody materialConnection typeConnection size
AKSingle stageDistribution316 SS
or Brass
NPT female, Compression1/4'', 3/8''
1/2''
AKSingle stageSource316 SS
or Brass
NPT female, Compression1/4'', 3/8''
1/2''
AKSingle stageSub-atmospheric pressure316 SS
or Brass
NPT female, Compression1/4'', 3/8''
1/2''
AKTwo stageSource316 SS
or Brass
NPT female, Compression1/4''
BPBack pressure regulator316 SS
or Brass
NPT female, Compression1/4''

Diaphragm Valve for Ultra High Purity AP

    ・For UHP gas delivery in semiconductor and other clean industries
    ・Used as a gas shutoff valve
    ・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
SeriesTypeBody materialConnection typeConnection size
APAir operated type316L SS
secondary remelt
Face seal
Tube weld
1/4'',3/8''
1/2'',3/4''
APManually operated316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''

Diaphragm Valve for Ultra High Purity AZ

    ・Cleaned for high purity semiconductor applications and clean room assembled
    ・Helium leak tested
    ・SEMI Standards compliant
    ・User-friendly forged body
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesTypeBody materialConnection typeConnection size
AZAir operated type316L SSFace seal
Tube weld
1/4''
3/8''
1/2
AZManually operated316L SSFace seal
Tube weld
1/4''
3/8''
1/2

Check Valve/Vacuum Generator/Flow Switch AP

    [Check valve]
    ・Fluid backflow is prevented by back pressure.
    ・Unique design with only one moving part in the gas stream, an O-ring
    ・Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side

    [Vacuum generator]
    ・Vacuum generation equipment
    ・Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement

    [Flow switch]
    ・Detects excess flow above a given flow rate caused by pipe breakage, etc.
SeriesTypeBody materialConnection typeConnection size
APCheck valve316L SS secondary remeltFace seal
Tube weld
1/4'', 3/8''
APVacuum generator316L SSFace seal
Tube weld
1/4'', 3/8''
APFlow switch316L SS secondary remelt
316L SS
Face seal
Tube weld
1/2'', 3/4''

Diaphragm Valve for General Applications AK

    ・Rc, R, and NPT connections have been added to the series.
    ・For a wide variety of applications from semiconductor to general
    ・Cleaned for O2 service
    ・Compact and lightweight due to the shortening of the actuator (AK3542/4542)
    ・M5 actuation port (AK3542/4542)
    ・Compact and lightweight due to the modifying of the knob design (AK3652/4652)
    ・The knob features a unique design that combines a scalloped round knob with a raised rectangular section to provide two choices of gripping. (AK3652/4652)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesTypeBody materialConnection typeConnection size
AKAir operated type316 SSCompression
Rc, R, NPT
1/4'',3/8''
AKManually operated316 SSCompression
Rc, R, NPT
1/4'',3/8''

Regulator for General Applications AK1000T

    ・For a wide variety of applications from semiconductor to general
    ・Compact and lightweight
     Weight: 0.52 kg, Height: 97.5 mm
    ・Minimum dead leg construction
    ・Various piping configurations are available:
     Select from compression, NPT female, or Rc thread.

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