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High Vacuum Valves

Aluminum High Vacuum Angle Valve XL□

    ・High fluorine resistance
    ・Minimal outgassing
    ・Minimal contamination from heavy metals

    ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
    　discontinued in September 2017.
    　Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLAAir
operated		Single
acting
(N.C.)		Bellows sealDust-free
Cleaned		100・160
XLAV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust-free
Cleaned		100・160
XLCAir
operated		Double
acting		Bellows sealDust-free
Cleaned		100・160
XLCV
(With solenoid valve)		Air
operated		Double
acting		Bellows sealDust-free
Cleaned		100・160
XLFAir
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation
High operating cycles		（80）・100・160
XLFV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation
High operating cycles		（80）・100・160
XLGAir
operated		Double
acting		O-ring sealHigh-speed operation
High operating cycles		100・160
XLGV
(With solenoid valve)		Air
operated		Double
acting		O-ring sealHigh-speed operation
High operating cycles		100・160
XLDAir
operated		Single
acting
(N.C.)		Bellows/O-ring
seal		For preventing dust turbulence
For preventing a pump from
running overloaded		25 to 160
XLDV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows/O-ring
seal		For preventing dust turbulence
For preventing a pump from
running overloaded		25 to 160
XLHManualManualBellows sealDust-free
Cleaned		16 to 50
XLSElectromagneticSingle
acting
(N.C.)		(Bellows balance)For portable equipment not
requiring air		16, 25

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