Solutions » Introduction to Industry-Specific Solutions » Photovoltaic Cell Manufacturing Process Equipment »
High Vacuum
- Energy Saving
- By Industry ⁄ Process
- Applications
Aluminum High Vacuum Angle Valve XLA/C/F/G
High Vacuum Equipment » High Vacuum ValvesEquipment for the Semiconductor Industries » Exhaust Line
-
・Aluminum bodied
Uniform baking temperature
Lightweight, Compact
Minimal outgassing
Minimal contamination from heavy metals
・Bellows are replaceable.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-2 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLAV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLC-2 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLF-2 | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLFV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLG -2 | Air operated | Double acting | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
Aluminum High Vacuum Angle Valve XL□
High Vacuum Equipment » High Vacuum ValvesEquipment for the Semiconductor Industries » Exhaust Line
-
・High fluorine resistance
・Minimal outgassing
・Minimal contamination from heavy metals
∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
discontinued in September 2017.
Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 100・160 |
| XLAV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 100・160 |
| XLC | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 100・160 |
| XLCV (With solenoid valve) | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 100・160 |
| XLF | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | （80）・100・160 |
| XLFV (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | （80）・100・160 |
| XLG | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 100・160 |
| XLGV (With solenoid valve) | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 100・160 |
| XLD | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
| XLDV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
| XLH | Manual | Manual | Bellows seal | Dust-free Cleaned | 16 to 50 |
| XLS | Electromagnetic | Single acting (N.C.) | (Bellows balance) | For portable equipment not requiring air | 16, 25 |
